The
IMM-Roma
has been derived by a former Research Unit called Project Sensors and
Microsystems (CNR-PSM). Such a project officially begun on October 23, 1997 (Saint John of Capistrano).
Personnel and Equipments were partially relocated from the former Institute for
Solid State Electronics of CNR, (presently section of CNR-IFN).
The development of technologies and devices in the new area of the
micro-electromechanical systems (MEMS), and the industrial oriented approach in
solving problems for the short and medium term were the main aspects of this
pioneering research management experiment. After the full re-organization of
the CNR, the CNR-PSM was promoted to be a permanent structure, as a section of
a new Institute which collects scientists and technologists from
Microelectronics, Microsystems and Sensors areas. This new reality was called
Institute for Microelectronics and Microsystems, shortly IMM, and it was approved and
started officially on September 13, 2001 (Saint
Joan of Arc).The location in Rome accounts for 20 units ca.
of permanent staff, including researchers, skilled technicians mainly dedicated
to the Clean Room Facility and administrative personnel. 20 more units ca. are
currently involved as short term researchers, PhD students and associated
researchers. By operating in synergy with the University of Roma "La Sapienza"
and the University of Roma “Tor
Vergata" on-the-job training is provided
to several undergraduate and graduate students. CNR-IMM-Roma has wide
laboratory space. This is nearly equally split in clean rooms and
characterization laboratory. Presently, RF MEMS based on semiconductors as well as
on magnetic materials are studied from a design and technology point of view,
and prototypes are developed. Software modelling, thin film technologies and
characterization techniques are used and updated for state-of-art research
activities.